Union Optical Hisomet-II Non-Contact Depth Measuring Microscope System

The Hisomet is a non-contact depth measuring microscope that has been designed based on the optical focal point detection system.  The precise focus indicator is adopted, so that the measurements of height, depth, steps, etc. are made possible simply by coinciding the two halves of an index graticule while observing the surface of a point of measurement.  As measurements can be made without concern for causing distortion or nicks to a specimen, Hisomet is ideal for measuring electronic components such as ICs and other precision parts. Hisomet is highly appreciated by manufacturers for its accurate measurements and inspections of objects, such as ICs, magnetic heads, electronic components, precision parts, etc.  Material and forms of specimens used in these industries are diversified.

Precise Focus Indicator

	Focused Condition	Out of Focus Condition
Black graticle
White-stripe graticle

Principle of Measurement

This microscope system offers a precise focus indicator consisting of a beam splitting prism, and black and white-stripe graticles built into the reflected-light optical system of the microscope, and has been designed based on the optical pricniple that at the correct focus, the clear image of the index graticle, of which the upper and lower halves coincide, can be observed above the focused image of a specimen, and that when defocused even slightly, the index line is split into two lines in the upper and lower halves of the graticle.

Method of Measurement

The exact focal point is secured by confirming that the vertical index lines in the upper and lower halves of the graticle coincide to fuse into exact straight lines, rather than by making judgments as to whether or not the image of a specimen surface is blurred.  Since this is a unique system that is neither affected by the focal depth of objective lenses nor dependent on the ability of the human eye to discriminate two points, the focal point can be determined very accurately in comparison with other focusing systems.  This focusing system and the digital gauge allow non-contact, high precision measurements of step heights between surfaces.

Advantages

• As a focal point is detected under the non-contact optical method, measurements can be made without being affected by physical damage to a specimen, such as distortion, nicks, etc.

• Since the precise focus indicator based on the "split-target method has been adopted, highly-accurate depth (step) measurements can be made simply by coinciding the two halves of the graticle.

• This system is ideal for use at application sites because its handling procedures are as simple as those of microscopes.

• While observing the submicron surface condition of a point of measurement, the positional relation between a reference point of measurement and a point of measurement can be confirmed, and measurements can also be made in the same field of view.

• Measurement accuracy can be increased through the use of high magnification objective lenses.

• Either a black or white-stripe graticle can be chosen in accordance with the reflectivity of specimen surfaces.  The "open" position of the three stage selecting lever can be used when photographs are to be taken without a graticle.

• Various models can be configured by the combination of different equipment such as a optical head, measuring stage, TV equipment, etc., depending on the applications of respective users.

Fiber Optic Illuminator System

Photographic System

Various types of automatic photographic systems are available for photography by 35mm camera, or Polaroid, or film formats.  For photography, the precise focus indicator can be changed over to the "open" position.

Depth Indicator Reading to 0.1µm

Consists of a depth detector for 0 to 10mm range and a digital counter reading to 0.1µm.  Recommended for submicron measurements of objects 1µm or less with the use of objective lenses of high magnification (40X or higher).

Digital Indicator

For DH2, various types of digital indicators are available.  Single and dual axes, measurement range, and minimum reading can be chosen depending on applications.  The digital printer is also available for the printout of measurement data.

Stage Specifications

Standard Specifications

Items		Description	Binocular	Trinocular
Microscope stand		Base (with built-in transformer).  Transmitted light illuminator (with built-in transformer).
Bracket		Precise focus indicator (with illuminator).  Fine focus by cross roller guide.  Coarse focus by rack & pinion.  Secondary cord (for EL-38).
Erect image binocular head		With C-mount, without eyepieces.		-
Erect image trinocular head		With C-mount, without eyepieces.	-
Measuring Stage	505S	50 x 50mm with stage glass and stage adapter.	To be selected.
	505L	50 x 50mm (T-slot) with stage glass.	To be selected.
	510	100 x 50mm (T-slot) with stage glass.	To be selected.
	510D	100 x 50mm (T-slot) with stage glass, linear scale, & dual axis counter (1µm readout). With stage adapter & stage glass.	To be selected.
	100D	100 x 100mm with linear scale and dual axis counter (1µm readout). With stage adapter & stage glass.	To be selected.
Eyepiece NWF10X		Field diameter ø16, with G-14 reticle.
Eyepiece NWF10X		Field diameter ø16.	-
Objective PLM10X		N.A.0.20, W.D. 12.0mm.
Z-axis indicator		0.001 readout, 25mm stroke, with special printer terminal.

Optional Accessories

Other Union Optical Microscopes:

-  DZ Magnification Zoom Microscopes
-  NSM Series Measuring Microscopes

For more information on a product or to request a price quote, please contact us by phone at 877-837-7260 (toll free) or 408-871-7700, fax 408-871-7800, or email us at labtekdiv@labtek.net.

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Copyright © 1998, Terran Technology, Inc.; Labtek Division
Last modified: November 06, 2012